A TORQUE TESTING STAGE FOR ROTATING MICRO-ELECTRO-MECHANICAL DEVICES

Abstract

Within the European project HAFAM (Handling and Assembly of Functionally Adapted Microcomponents) a testing stage for characterizing rotating micro-electro-mechanical machines has been developed. The objective of this micro torque testing stage is to provide a flexible and modular means for assessing the performance and the quality of both active and passive micro machine components, e.g. micro motors or micro ball bearings. This task has been accomplished by using the following principle.

A master motor drives the rotating component under investigation and imposes a certain rotation speed. If an active micro-electro-mechanical component is tested for example, this device is controlled synchronously to the rotor angle of the driving motor. Hence, the torque produced by the micro-electro-mechanical component or other significant values will essentially depend on the control signals applied. The control of both the master and the probe motors as well as the measurement of various probe signals is carried out by a computer under a real-time operating system, real-time Linux.

A graphical user interface offers the possibility for an easy machine control, signal evaluation and post processing for the final evaluation of the devices under investigation.

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Copyleft 1999, Peter Wurmsdobler.