A testing stage for the assessment of rotating micro electro-mechanical components

Abstract

Micro-mechanical devices, and in particular rotating micro-mechanical devices such as micro motors and micro actuators, or passive components like micro ball bearings and spiral springs can nowadays be found in a variety of consumer goods. Before they can be used and implemented, however, their performance and quality has to be assessed, already during development and later on, in the production line. In the framework of a European project, CTM (Centre de Transfert des Microtechniques), a R&D centre in the field of micro technology, has developed a testing stage for characterizing such micro mechanical devices.

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Copyleft 1999, Peter Wurmsdobler.